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Board inspecting apparatus and method of compensating board distortion using the same
Board inspecting apparatus and method of compensating board distortion using the same
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机译:基板检查装置以及使用该基板检查装置补偿基板变形的方法
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摘要
A board inspecting apparatus include a measuring section, a processing section and a display section. The measuring section obtains measurement data for at least a portion of a board. The processing section compares the measurement data and reference data of the board, based on selection feature objects, by associated selection feature objects, to perform distortion compensation for the board, and inspects the board with distortion compensation. The display section distinguishably displays a first area with the distortion compensation successful and a second area with the distortion compensation failed. The processing section compares a number of recognizable effective feature objects with a reference number, and determine the distortion compensation as failed when the number of the recognizable effective feature objects is below the reference number. Thus, user's convenience may be improved, a user may easily recover failure of distortion compensation, and accurate and valid distortion compensation may be available.
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