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Board inspecting apparatus and method of compensating board distortion using the same

机译:基板检查装置以及使用该基板检查装置补偿基板变形的方法

摘要

A board inspecting apparatus include a measuring section, a processing section and a display section. The measuring section obtains measurement data for at least a portion of a board. The processing section compares the measurement data and reference data of the board, based on selection feature objects, by associated selection feature objects, to perform distortion compensation for the board, and inspects the board with distortion compensation. The display section distinguishably displays a first area with the distortion compensation successful and a second area with the distortion compensation failed. The processing section compares a number of recognizable effective feature objects with a reference number, and determine the distortion compensation as failed when the number of the recognizable effective feature objects is below the reference number. Thus, user's convenience may be improved, a user may easily recover failure of distortion compensation, and accurate and valid distortion compensation may be available.
机译:板检查设备包括测量部分,处理部分和显示部分。测量部分获得板的至少一部分的测量数据。处理部分基于选择特征对象,通过关联的选择特征对象,比较板的测量数据和参考数据,以对板进行畸变补偿,并检查具有畸变补偿的板。显示部分区别地显示失真补偿成功的第一区域和失真补偿失败的第二区域。处理部分将可识别的有效特征对象的数量与参考数字进行比较,并且当可识别的有效特征对象的数量低于参考数字时,将失真补偿确定为失败。因此,可以提高用户的便利性,用户可以容易地恢复失真补偿的失败,并且可以使用准确有效的失真补偿。

著录项

  • 公开/公告号US10791661B2

    专利类型

  • 公开/公告日2020-09-29

    原文格式PDF

  • 申请/专利权人 KOH YOUNG TECHNOLOGY INC.;

    申请/专利号US201716339213

  • 发明设计人 SEUNG WON JUNG;JONG JIN CHOI;

    申请日2017-09-22

  • 分类号H05K13/08;G01B11/24;G01N21/956;

  • 国家 US

  • 入库时间 2022-08-21 11:29:02

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