首页>
外国专利>
Method and system for calculating a height map of a surface of an object from an image stack in scanning optical 2.5D profiling of the surface by an optical system
Method and system for calculating a height map of a surface of an object from an image stack in scanning optical 2.5D profiling of the surface by an optical system
展开▼
机译:在通过光学系统扫描表面的光学2.5D轮廓中从图像堆栈计算对象表面高度图的方法和系统
展开▼
页面导航
摘要
著录项
相似文献
摘要
Method and system for calculating a height map of a surface of an object from an image stack in scanning optical 2.5D profiling of the surface by an optical system, a focal plane is scanned at different height positions with respect to the object surface. An image is captured at each height position of the focal plane to form the image stack. The scanning of the focal plane comprises long range sensing and short range sensing a displacement of the focal plane for sensing low and high spatial frequency components. The height position of the focal plane is estimated by combining the low and high spatial frequency components. A height position of each image in the image stack is calculated, based on the estimated height position of each respective focal plane. The images of the image stack are interpolated to equidistant height positions for obtaining a corrected image stack.
展开▼