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Method for making CMOS image sensor including stacked semiconductor chips and image processing circuitry including a superlattice
Method for making CMOS image sensor including stacked semiconductor chips and image processing circuitry including a superlattice
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机译:包括堆叠半导体芯片的CMOS图像传感器的制造方法以及包括超晶格的图像处理电路
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摘要
A method for making a CMOS image sensor may include forming a first semiconductor chip including an array of image sensor pixels and readout circuitry electrically connected thereto, forming a second semiconductor chip including image processing circuitry electrically connected to the readout circuitry, and coupling the first semiconductor chip and the second semiconductor chip in a stack. The processing circuitry may include a plurality of transistors each including spaced apart source and drain regions, a superlattice channel extending between the source and drain regions, and a gate including a gate insulating layer on the superlattice channel and a gate electrode on the gate insulating layer.
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