APPARATUS FOR ELECTRODELESS MEASUREMENT OF ELECTRON MOBILITY IN NANO MATERIAL, APPARATUS FOR ELECTRODELESS MEASUREMENT OF HOLE MOBILITY IN NANO MATERIAL, METHOD FOR ELECTRODELESS MEASUREMENT OF ELECTRON MOBILITY IN NANO MATERIAL, AND METHOD FOR ELECTRODELESS MEASUREMENT OF HOLE MOBILITY IN NANO MATERIAL

摘要

A method for measuring electron mobility according to the present invention, which is performed by an apparatus comprising a chamber forming a sealed space, an electron gun provided in the chamber, and a metal sample disposed opposite to the electron gun in the sealed space, comprises: an electron irradiation step of irradiating the metal sample with electrons by the electron gun; a sample current measurement step of applying a voltage to the metal sample to measure a sample current obtained in the metal sample according to the applied voltage; a secondary electron current calculation step of calculating a secondary electron current through the measured sample current; and an effective incident current definition step of defining the sum of the measured sample current and the calculated secondary electron current as an effective incident current.