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LPS solder paste based low cost fine pitch pop interconnect solutions

机译:基于LPS焊膏的低成本细间距弹出互连解决方案

摘要

Embodiments describe high aspect ratio and fine pitch interconnects for a semiconductor package, such as a package-on-package structure. In an embodiment, the interconnects are formed with a no-slump solder paste. In an embodiment, the no-slump solder paste is printed in an uncured state, and is then cured with a liquid phase sintering process. After being cured, the no-slump solder paste will not reflow at typical processing temperatures, such as those below approximately 400° C. According to embodiments, the no-slump solder paste includes Cu particles or spheres, a solder matrix component, a polymeric delivery vehicle, and a solvent. In an embodiment, the liquid phase sintering produces a shell of intermetallic compounds around the Cu spheres. In an embodiment, the sintering process builds a conductive metallic network through the no-slump solder paste.
机译:实施例描述了用于半导体封装(例如,封装上封装结构)的高纵横比和细间距互连。在一个实施例中,互连件由不塌陷的焊膏形成。在一个实施例中,将不坍落的焊膏以未固化的状态印刷,然后通过液相烧结工艺进行固化。固化后,无坍落度焊膏将不会在典型的加工温度(例如低于约400°C的温度)下回流。根据实施方式,无坍落度焊膏包括Cu颗粒或球体,焊料基质成分,聚合物运输工具和溶剂。在一个实施方案中,液相烧结产生围绕Cu球的金属间化合物的壳。在一个实施例中,烧结过程通过无坍落的焊膏建立导电的金属网络。

著录项

  • 公开/公告号US10586779B2

    专利类型

  • 公开/公告日2020-03-10

    原文格式PDF

  • 申请/专利权人 INTEL CORPORATION;

    申请/专利号US201715792569

  • 申请日2017-10-24

  • 分类号H01L25;H01L25/10;H01L23;H01L23/498;H01L23/538;B23K35/22;B23K35/26;B23K35/36;B23K35/30;B23K35/02;B23K101/40;

  • 国家 US

  • 入库时间 2022-08-21 11:25:24

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