SHIFTING-IN/OUT MECHANISM, AND SHIFTING-IN/OUT DEVICE USED FOR WORKPIECE TABLE OF PHOTOETCHING MACHINE

摘要

A shifting-in/out mechanism includes a connecting block, flat spring made of two segments connected by a hinge, spring deflection assembly and wheel assembly. One segment of the flat spring is connected to the wheel assembly and the other is mounted, by the connecting block, on an object to be moved. The spring deflection assembly provides a driving force for deflecting the segment of the flat spring connected to the wheel assembly toward a movement supporting surface. A shifting-in/out device for a workpiece stage of a photoetching machine includes a bottom frame, air spring, air-cushion device and plurality of the mechanisms arranged on a lower or side surfaces of the bottom frame. In the mechanism, the flat spring has two segments hinged together. All locations of the flat spring that are stressed to cause deflection of the flat spring are substantially on a single line.