GROWTH AND OPTIMIZATION OF METAL-ORGANIC FRAMEWORK THIN FILMS ON A CONDUCTIVE METAL OXIDE FOR GAS SENSOR APPLICATIONS

摘要

A system and method for forming a sensor. The method includes forming a template and forming a hydroxy double salt layer intermediate. The method further includes forming a metal-organic framework (MOF) film. A method of forming a sensor. One embodiment of the method includes forming a template and forming a hydroxy double salt layer intermediate. The method further includes forming a metal-organic framework (MOF) film and forming a hybrid MOF/conducting metal oxide structure.