首页> 外国专利> OBSERVATION TARGET OBJECT COVER, CONTAINER FOR INTERFERENCE OBSERVATION, INTERFERENCE OBSERVATION DEVICE, AND INTERFERENCE OBSERVATION METHOD

OBSERVATION TARGET OBJECT COVER, CONTAINER FOR INTERFERENCE OBSERVATION, INTERFERENCE OBSERVATION DEVICE, AND INTERFERENCE OBSERVATION METHOD

机译:观察目标对象覆盖物,用于干扰观察的容器,干扰观察装置以及干扰观察方法

摘要

Provided is an observation target cover for interference observation using first light and second light having a coherent length longer than that of the first light so as to acquire an interference light image of an observation target by the first light while adjusting an optical path length difference based on an interference result of the second light, the observation target cover including: a transmission reflection portion that transmits the first light and reflects the second light; and a support portion for supporting the transmission reflection portion so that a placement surface on which the observation target is placed and the transmission reflection portion face each other with a predetermined gap therebetween.
机译:提供一种用于观察干涉的观察目标盖,该观察目标盖使用相干长度比第一光长的相干长度的第一光和第二光,从而在调节光程差的基础上通过第一光获取观察目标的干涉光图像。观察对象罩,在第二光的干涉结果上,具有使第一光透射并反射第二光的透射反射部。支撑部用于支撑透射反射部,使得放置观察目标的放置表面与透射反射部在它们之间具有预定间隙地彼此面对。

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