SYSTEM AND METHOD THAT CONSIDER TOOL INTERACTION EFFECTS FOR IDENTIFYING ROOT CAUSES OF YIELD LOSS

摘要

Embodiments of the present disclosure provide a two-phase process for searching root causes of a yield loss in a production line. In a first phase, an interaction between two process tools, that between two parameters, or that between one process tool and one parameter that is likely to cause the yield loss is identified. In a second phase, a threshold of the parameter that is likely to cause the yield loss and is obtained from the first phase is identified. In each phase, two different algorithms can be used to generate a reliance index (RI_I) for gauging the reliance levels of their search results.