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INTEGRATED ACTIVE DEVICES WITH IMPROVED OPTICAL COUPLING BETWEEN ACTIVE AND PASSIVE WAVEGUIDES
INTEGRATED ACTIVE DEVICES WITH IMPROVED OPTICAL COUPLING BETWEEN ACTIVE AND PASSIVE WAVEGUIDES
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机译:有源和无源波导之间具有改进的光学耦合的集成有源设备
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摘要
An optical device comprises first, second and third elements fabricated on a common substrate. The first element comprises an active waveguide structure supporting a first optical mode, the second element comprises a passive waveguide structure supporting a second optical mode, and the third element, at least partly butt coupled to the first element, comprises an intermediate waveguide structure supporting intermediate optical modes. If the first optical mode differs from the second optical mode by more than a predetermined amount, a tapered waveguide structure in at least one of the second and third elements facilitates efficient adiabatic transformation between the second optical mode and one of the intermediate optical modes. No adiabatic transformation occurs between any of the intermediate optical modes and the first optical mode. Mutual alignments of the first, second and third elements are defined using lithographic alignment marks.
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