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METHOD FOR FABRICATING ARRAY SUBSTRATE MOTHERBOARD, ARRAY SUBSTRATE MOTHERBOARD AND DETECTION METHOD

机译:阵列基板母板的制作方法,阵列基板母板及检测方法

摘要

A method for fabricating an array substrate motherboard, an array substrate motherboard and a detection method are provided. The method for fabricating an array substrate motherboard includes depositing a first film on a substrate, wherein a first gap is present between the edge of the first film and the edge of the substrate, coating photoresist on the substrate on which the first film is deposited, and exposing and developing the photoresist to form a first scale pattern from the photoresist. One end of the first scale pattern is flush with the edge of the substrate and the other end covers the first film.
机译:提供了一种阵列基板母板的制造方法,阵列基板母板和检测方法。用于制造阵列基板母板的方法包括:在基板上沉积第一膜,其中在第一膜的边缘与基板的边缘之间存在第一间隙,在其上沉积有第一膜的基板上涂覆光致抗蚀剂,曝光和显影光致抗蚀剂以从光致抗蚀剂形成第一刻度图案。第一刻度尺图案的一端与基板的边缘齐平,另一端覆盖第一膜。

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