A terahertz wave signal analysis device includes a fitting processing unit 13 that fits synthetic waveforms of a plurality of normal distribution functions which differ in at least one of a center frequency, an amplitude, and a width to a frequency spectrum obtained from a terahertz wave signal and a graph generating unit 14 that generates a graph using at least one of a center frequency, an amplitude, and a width of a plurality of normal distribution functions used in the fitting as parameters, and it is possible to visualize a feature corresponding to a characteristic of a sample in the form of a graph in an easy-to-understand manner by approximating a frequency spectrum which does not clearly appear because a difference in the characteristic of the sample becomes a feature of a waveform by synthetic waveforms of a plurality of normal distribution functions in a form in which the characteristic of the sample is taken over and generating a graph on the basis of parameters of a plurality of normal distribution functions used in the approximation.
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