ATOMIC PRECISION CONTROL OF WAFER-SCALE TWO-DIMENSIONAL MATERIALS

摘要

Embodiments of this disclosure include apparatus, systems, and methods for fabricating monolayers. In one example, a method includes forming a multilayer film having a plurality of monolayers of a two-dimensional (2D) material on a growth substrate. The multilayer film has a first side proximate the growth substrate and a second side opposite the first side.