MAGNETIC DAMPING DEVICE FOR DAMPING VIBRATIONS OF A CARRIER; CARRIER FOR CARRYING A PLANAR OBJECT, TRANSPORT SYSTEM FOR TRANSPORTING A CARRIER, AND METHOD OF CONTACTLESSLY TRANSPORTING A CARRIER

摘要

A magnetic damping device (100) for damping vibrations of a carrier is described. The magnetic damping device (100) includes a first assembly (110) including at least one conductive plate element (111). Additionally, the magnetic damping device (100) includes a magnet assembly (120) having at least one slot (123) extending in a damping direction (101). The at least one conductive plate element (111) extends into the at least one slot (123). Further, the magnetic damping device (100) includes a mass element (130) connected to the magnetic assembly (120) and a spring device (140) connecting the mass element (130) with the first assembly (110). Moreover, a carrier for carrying a planar object, a transport system for transporting a carrier, and a method of contactlessly transporting a carrier are described.