MICRO LED LIGHT EMISSION INSPECTION DEVICE, INSPECTION DEVICE FOR OPTICAL FILTER USED IN SAID DEVICE, AND MICRO LED LIGHT EMISSION INSPECTION METHOD USING SAID DEVICE INCORPORATED IN MANUFACTURING PROCESS

摘要

This micro LED light emission inspection device, which inspects the quality of a plurality of micro LEDs formed with a dot pitch of 0.1 mm or less on a wafer, partially comprises a structure such as a power feeding mechanism, an optical lens, an imaging device, a digital image processing device, an optical filter, a filter driving mechanism, and a control device. An individual micro LED to be measured is automatically found and identified by the digital image processing device from a captured image, the light intensities of the micro LEDs generated from screen frame images are collectively measured, and the light emission wavelengths of the micro LEDs are also determined rapidly in a significantly different inspection time by controlling the measurement of two types of light intensities including the absence of an optical filter and the presence of the optical filter by using the optical filter in which the intensity of filter-transmitted light monotonically increases or decreases in a predetermined optical wavelength band.