SOLVENT FOR GAS CHROMATOGRAPY MASS SPECTOMETRY, AND METHOD FOR DETERMINATION OF FLUORINE-CONTAINING SUBSTANCES ON THE SURFACE OF FLUORORESIN MELT-MOLDED PRODUCTS

摘要

Provided is a fluorine-containing solvent for gas chromatography mass spectrometry of fluorine-containing substances found contaminating surfaces of fluororesin melt-molded products and detrimental to the use of such products for handling fluids in semiconductor manufacture. Also provided is a quantitative determination method for such fluorine-containing substances and a qualitative analysis method for such fluorine-containing substances based on a gas chromatography mass spectrometry method using the fluorine-containing solvent to enable the determination of the presence or absence of trace amounts of contaminant fluorine-containing substances existing as fine particles on surfaces of melt-molded fluororesin products.