BI-DIRECTIONAL ASSOCIATION AND GRAPHICAL ACQUISITION OF TIME-BASED EQUIPMENT SENSOR DATA AND MATERIAL-BASED METROLOGY STATISTICAL PROCESS CONTROL DATA

摘要

Described herein are methods and systems for linking sensor data to metrology data and for linking metrology data to sensor data. In one embodiment, a user selection of metrology data for a product is received, an associated process tool defect detection summary for metrology data for a selected product is presented, and a user selection of a process tool from the process tool defect detection summary is received. And relevant defect detection details for the selected process tool are presented.