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Electrochemical migration preventive additives and method for inhibiting electrochemical migration by using the same

机译:防止电化学迁移的添加剂和使用其的抑制电化学迁移的方法

摘要

The present invention relates to an electrochemical migration (ECM) prevention additive of a wiring. The present invention relates to a method for preventing ECM of the wiring using the prevention additive. When a solution, to which the ECM prevention additive proposed in the present invention is added, is compared with an existing solution, generation of dendrite is suppressed to confirm an ECM time to be longer. The additive proposed in the present invention is mixed or used to a polymer material such as epoxy molding compound (EMC), underfill or the like, or is added to a metal wiring to increase reliability of a semiconductor element.
机译:本发明涉及布线的防止电化学迁移(ECM)的添加剂。本发明涉及一种使用预防添加剂来防止配线的ECM的方法。当将添加了本发明提出的ECM防止添加剂的溶液与现有溶液进行比较时,抑制枝晶的产生,以确认ECM时间更长。在本发明中提出的添加剂被混合或用于诸如环氧模塑料(EMC),底部填充剂等的聚合物材料,或被添加至金属布线以提高半导体元件的可靠性。

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