首页> 外国专利> SYSTEM AND METHOD FOR DISCERTE EVENT SYSTEM SPECIFIACTION AND SIMULATION ENTITY OUTSOURCING BASED SEMICONDUCTOR PROCESS MODELING AND SIMULATION

SYSTEM AND METHOD FOR DISCERTE EVENT SYSTEM SPECIFIACTION AND SIMULATION ENTITY OUTSOURCING BASED SEMICONDUCTOR PROCESS MODELING AND SIMULATION

机译:基于离散事件系统规范和仿真实体外包的半导体过程建模与仿真的系统和方法

摘要

Disclosed are a semiconductor process modeling and simulation system based on the discrete event specification and simulation entity outsourcing and a method thereof. According to one embodiment, semiconductor process modeling and simulation system based on discrete event specification and simulation entity outsourcing comprises: a semiconductor process modeling management unit generating a semiconductor process model based on the discrete event specification; a semiconductor process simulation management unit performing simulation based on the generated semiconductor process model; and a simulation entity outsourcing management unit signing or terminating a contract for outsourcing in accordance with whether outsourcing for the simulation is required.
机译:公开了一种基于离散事件规范和仿真实体外包的半导体工艺建模与仿真系统及其方法。根据一个实施例,基于离散事件规范和模拟实体外包的半导体过程建模和仿真系统包括:半导体过程建模管理单元,其基于离散事件规范生成半导体过程模型;以及半导体工艺模拟管理单元基于所生成的半导体工艺模型进行仿真;模拟实体外包管理单元根据是否需要模拟外包来签订或终止外包合同。

著录项

  • 公开/公告号KR20200041489A

    专利类型

  • 公开/公告日2020-04-22

    原文格式PDF

  • 申请/专利号KR20180121568

  • 发明设计人 HAN YOUNG SHIN;

    申请日2018-10-12

  • 分类号G05B19/418;G06F30;H01L21/67;

  • 国家 KR

  • 入库时间 2022-08-21 11:07:16

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