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SYSTEM AND METHOD FOR DISCERTE EVENT SYSTEM SPECIFIACTION AND SIMULATION ENTITY OUTSOURCING BASED SEMICONDUCTOR PROCESS MODELING AND SIMULATION
SYSTEM AND METHOD FOR DISCERTE EVENT SYSTEM SPECIFIACTION AND SIMULATION ENTITY OUTSOURCING BASED SEMICONDUCTOR PROCESS MODELING AND SIMULATION
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机译:基于离散事件系统规范和仿真实体外包的半导体过程建模与仿真的系统和方法
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摘要
Disclosed are a semiconductor process modeling and simulation system based on the discrete event specification and simulation entity outsourcing and a method thereof. According to one embodiment, semiconductor process modeling and simulation system based on discrete event specification and simulation entity outsourcing comprises: a semiconductor process modeling management unit generating a semiconductor process model based on the discrete event specification; a semiconductor process simulation management unit performing simulation based on the generated semiconductor process model; and a simulation entity outsourcing management unit signing or terminating a contract for outsourcing in accordance with whether outsourcing for the simulation is required.
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