Double-blade robot with vertically offset and horizontally overlapping frog leg linksage and systems and methods comprising same

摘要

A double blade robot with overlapping frog leg linksages is disclosed. The robots are in the same plane as each other in a frog leg configuration, and each of the first and second arms rotatably coupled to the first blade, and the frog legs are coplanar with each other and rotatable respectively in the second blade And a combined third and fourth arms, wherein the third and fourth arms are vertically offset from the first and second arms. The third and fourth arms are configured to overlap with at least a portion of the first and second arms when the first and second blades are in the retracted position. Methods of operating a robot and electronic device processing systems including the robot are provided, as in many other aspects.