Chemical delivery system and how the chemical delivery system works

摘要

The chemical delivery system includes a bulk container, a run/refill chamber, a first conduit and a second conduit. The bulk container stores precursors. The run/refill chamber includes a plurality of spaced apart tubes having a plurality of surfaces for receiving the precursor in vapor form and storing the precursor in solid form. The first conduit connects the bulk container to the run/refill chamber to transport the precursor from the bulk container to the run/refill chamber in vapor form. The second conduit connects the run/refill chamber to the deposition chamber to transport the precursor from the run/refill chamber to the deposition chamber in vapor form.