FOCUSED ION BEAM IMPURITY IDENTIFICATION

摘要

A dual beam system with a charged particle beam (CPB) lens and an ion beam column can operate in analysis mode. In the analysis mode, the ion beam from the ion beam column may be deflected by the CPB into one or more component beams including a primary ion beam and one or more non-primary ion beams. A dual-beam system can identify ionic species in ion beams that are not primary.