Vacuum pad for vacuum chuk with coanda vacuum nozzle and packing ring

摘要

The present invention relates to a vacuum chuck vacuum pad having a Coanda vacuum nozzle and a packing ring, and more particularly, when flat processing of a thin plate-shaped workpiece, the thin plate-shaped workpiece is absorbed and fixed to the vacuum pad of the vacuum chuck. Vacuum chuck vacuum pad equipped with a Coanda vacuum nozzle and packing ring to prevent reduction in flatness due to warpage of the thin plate-shaped workpiece due to vacuum adsorption with high vacuum degree without vacuum pressure. It is about.