Apparatus for at least one of holding, positioning, and moving an object and a method of operating the apparatus for at least one of holding, positioning, and moving an object

摘要

An apparatus for holding, positioning, and/or moving an object is described. The device includes a base 30 and a carrier 50 movable relative to the base 30. The device further comprises at least three magnetic bearings, by means of which the carriers 50 are contactlessly supported on the base 30 so that the carriers can be displaced in at least one predetermined direction 2 And at least two of the magnetic bearings 10 are configured as actively controllable magnetic bearings. The device has at least one damping unit 100 fixed to the carrier 50 or to the base 30.