Reduction efficiency measurement and analysis automation system for reduction facility of greenhouse gas emissions in semiconduct and display process

摘要

The present invention relates to a system for automatically measuring and analyzing the reduction efficiency of facilities for reducing greenhouse gas emissions from semiconductor and display processes, and more particularly, to a method for calculating greenhouse gas emissions in semiconductor and display processes (Korean Industrial Standard KS H NEW 2017). Automatic measurement of reduction efficiency of GHG reduction facilities for semiconductor and display processes that can automatically perform calibration and measurement methods according to the guideline (National Institute of Environmental Sciences) for measuring reduction efficiency of greenhouse gas reduction facilities used in the semiconductor & display industry It relates to an analysis system.