Design recognition system, method and computer program product for detecting overlay-related defects in multi-patterned manufacturing devices

摘要

A design recognition system, method and computer program product for detecting overlay-related defects in a multi-patterned fabrication device are provided. In use, the design of the multiple patterned fabrication element is received by a computer system. The computer system then automatically determines from the design one or more design areas prone to overlay errors. Further, an indication of the determined one or more regions is output to an inspection system by a computer system for use in inspecting multiple patterned elements manufactured according to the design.