Arrangement of a substrate made of a piezoelectric material and a carrier substrate and method for their production

摘要

(Object) The object is to improve the joining strength of a joined body when joining a substrate made of a piezoelectric material composed of lithium tantalate or the like and a support substrate with a silicon oxide layer provided thereon. (Solution) A joined body includes a support substrate 4 , a silicon oxide layer 5 provided on the support substrate 4, and a substrate made of a piezoelectric material 1 provided on the silicon oxide layer 5 and composed of a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate is. The surface resistivity of the substrate made of a piezoelectric material 1 on the silicon oxide layer 5 side is 1.7 × 10 15 Ω / □ or higher.