Method, magnetron target, magnetron arrangement and vacuum arrangement

摘要

According to various embodiments, a magnetron target (102) can have: a tubular carrier (106), the carrier (106) having an opening which extends from a first end section of the carrier (106) to a second end section of the carrier; a flange (104) connected to the first end portion of the carrier, the flange (104) having a protrusion projecting radially outwardly with respect to the carrier; wherein the second end section has a circumferential groove and / or a smaller diameter than the flange.