End block arrangement and processing arrangement

摘要

According to various embodiments, an end block arrangement (100; 200) for rotatably mounting a tubular electrode (111) about an axis of rotation (114) in a process chamber (112) can have the following: an outer sleeve (101) with a flange (101f), wherein the flange (101f) has a connection surface (112a) for fastening the outer sleeve (101) to the outside (112a) of a process chamber (112); an inner sleeve (102), the inner sleeve (102) being arranged within the outer sleeve (101); a receiving area (103) within the inner sleeve (102) for receiving a subgroup of at least two of the following means: a drive means (106), an electrical contact means (107), a bearing means (105), a coolant sealing means (108) or a vacuum sealing means ( 104); an insulating sleeve (109), the insulating sleeve (109) being arranged between the outer sleeve (101) and the inner sleeve (102) and being in contact (113) with the outer sleeve (101) and the inner sleeve (102).