METHOD FOR POSITIONING AN OPTICAL COMPONENT

摘要

A method for positioning an optical component (202) in a parking position (PP) in an optical system (100A, 100B) is disclosed, the method comprising the following steps: a) determining (602-1, 602-2, 602'-1, 602'-2) a required manipulated variable (SG) for positioning the optical component (202) in the parking position (PP), b) determining (602-3, 602'-3) a target position (P _{soll_t1} , P _{soll_t2} , P _{soll_M} ) from the determined manipulated variable (SG) using a dependency ratio, c) ensuring (604) a deactivated state of a controller unit (508), d) determining (605) a second part of the manipulated variable (SG ₂ ) as a function of the determined target position (P _{soll_t1} , P _{soll_t2} , P _{soll_M} ) using a pilot control unit (510), and e) positioning (606) the optical component (202) as a function of the determined second part of the manipulated variable (SG2) with the aid of an actuator (216).