Procedure for evaluating damped measurement signals

摘要

A method is used for evaluating attenuated measurement signals from a structure (4) to be imaged, which is arranged under a sample surface (1), with a detector (2) receiving the sample surface (1) and an evaluation unit (7) for evaluating the structure (4) to be imaged. recorded measurement signals (6) described. In order to design a method of the type described at the outset in such a way that any loss of information from measurement signals used for imaging is determined after the recording and an ideal signal with reduced information loss can be reconstructed therefrom, it is proposed that the evaluation unit (7) read the data from the detector (2) reads the recorded, time-discrete measurement signal and the evaluation unit (7) first reconstructs the loss of information caused by the passage of the time-discrete measurement signal from the structure (4) to the sample surface (1) via a damping matrix using an iterative evaluation algorithm and the thus reconstructed measurement signal as the ideal signal , which is a solution of the wave equation, is then fed to an imaging device.