Device for guiding a liquid or gaseous medium, method for producing a corresponding device, field facet module and projection exposure system

摘要

The invention relates to a method for producing a device for guiding a liquid or gaseous medium in a vacuum environment, according to which an assembly (1) comprising at least a first component (2) made of metal and a second component (3) made of metal are assembled in such a way that the components (2,3) together form at least one channel (4) for the medium, after which the components (2,3) are connected to one another in a materially bonded manner. According to the invention it is provided that the components (2, 3) are materially connected to one another by diffusion welding.