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X-ray fluorescence analysis system, X-ray fluorescence analysis apparatus, and X-ray fluorescence analysis method

摘要

PROBLEM TO BE SOLVED: To provide a fluorescent X-ray analysis system, a fluorescent X-ray analysis apparatus and a fluorescent X-ray analysis method capable of specifying a measurement position of a sample while realizing highly accurate measurement. An imaging unit 20 is arranged on the opposite side of an X-ray source 7 and a detector 8 with a sample table 2 in between, and acquires first to fourth images before measurement. The first image is the whole image of the opening 4, the second image is the whole image of the front surface SA, and the third image is the whole image of the back surface SB. The fourth image is an entire image of the back surface SB in a state where the sample S is placed on the sample table 2 so that the measurement position is exposed from the opening 4. The information processing device 14 is a surface in the state where the sample S is placed on the sample table 2 so that the measurement position is exposed from the opening 4 based on the first to fourth images acquired by the imaging unit 20. The position of the opening 4 in the SA is specified, and based on the specified position of the opening 4, a composite image is generated by combining the entire image of the surface SA and the contour image of the opening 4. [Selection diagram] Figure 1

著录项

  • 公开/公告号JP2020085826A

    专利类型发明专利

  • 公开/公告日2020.06.04

    原文格式PDF

  • 申请/专利权人 株式会社島津製作所;

    申请/专利号JP2018224802

  • 发明设计人 鈴木 桂次郎;

    申请日2018.11.30

  • 分类号

  • 国家 JP

  • 入库时间 2022-08-21 10:57:50

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