IMAGE SENSOR PACKAGE FOR FINE PARTICLE COUNTING USING VIRTUAL GRID LINES AND FINE PARTICLE COUNTING SYSTEM AND METHOD THEREOF

摘要

An image sensor package for fine particle counting using a virtual grid line, and a fine particle counting system and method are provided. The image sensor package is formed on an image sensor array, an outer region of the image sensor array, and a virtual grid line including a plurality of protruding patterns spaced apart at predetermined intervals toward a central region of the image sensor array. A grid pattern layer for forming, a dam pattern layer for forming a channel formed on the grid pattern layer, having a predetermined height, and forming a channel or a chamber in which fine particles for counting are accommodated, and a cover formed on the dam pattern layer Contains glass.