Behavior analysis program and behavior analysis device for charged particle beam, and behavior analysis method

摘要

PROBLEM TO BE SOLVED: To provide a behavior analysis program and behavior analysis apparatus for a charged particle beam capable of taking space charges into consideration, obtaining results in a short time and having little numerical noise, and a behavior analysis method. To do. SOLUTION: A behavior analysis program divides a charged particle beam 1 into a plurality of bins 2 in the orbital direction, and in each divided bin 2, a region in which the charged particle beam 1 can exist is laminated in a radial direction. The calculation is performed by dividing the layer 10 into a large number of layers 10 and dividing the layer 10 into finite elements 20 and calculating the average density distribution of the charged particle beam 1 divided for each layer 10 of the bin 2. A procedure for smoothing the average density distribution in the radial direction, a procedure for calculating the electromagnetic force due to the electromagnetic field induced by the charged particle beam 1 using the smoothed density distribution, and the calculated electromagnetic force reflected in the beam behavior analysis. Then, the procedure for obtaining the beam characteristics of the charged particle beam 1 is performed. [Selection diagram]