GELENK FÜR MIKRO- UND NANOELEKTRISCHE SYSTEME MIT BEWEGUNGEN AUSSERHALB DER EBENE, DAS EINE REDUZIERTE NICHTLINEARITÄT ERMÖGLICHT

摘要

Articulation between a first part and a second part of a microelectromechanical system, said system comprising a first (S) and a second element (M) movable with respect to each other in an out-of-plane direction, said articulation comprising a first rigid part (4), a second part (6) integral with a first face of the first part (4) by one end and anchored to the second element by a second end, said second part (6) being deformed in bending from the out-of-plane direction, a third part (8) integral with a first face of the first part (4) by a first end, and anchored to the first element (S) by a second end, the third part (8) deforming in flexion in the out-of-plane direction (Z), and, in an undeformed state, the second part (6) and the third part (8) each comprising a face located in the same plane (P2) orthogonal to the direction out of plane (Z).