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CARTE SONDE DE PLAQUETTE, APPAREIL D'ANALYSE COMPRENANT LADITE CARTE ET PROCÉDÉ DE FABRICATION DE LA CARTE SONDE DE PLAQUETTE
CARTE SONDE DE PLAQUETTE, APPAREIL D'ANALYSE COMPRENANT LADITE CARTE ET PROCÉDÉ DE FABRICATION DE LA CARTE SONDE DE PLAQUETTE
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摘要
Provided are a wafer probe card which can match in one-to-one correspondence with an LED wafer by implementing a probe system having the same size as the LED wafer, and can inspect the brightness and a wavelength of light emitted from a plurality of LEDs at once by controlling the plurality of LEDs to emit light, an analysis apparatus having the same, and a method for fabricating the wafer probe card.
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