Non-contact online thickness measurement system for metal films based on eddy current sensing with distance tracking technique

摘要

This paper proposes an online, non-contact metal film thickness measurement system based on eddy current sensing. The slope of the lift-off curve (LOC) is used for characterizing target thickness. Theoretical derivation was conducted to prove that the slope is independent of the lift-off variation. In practice, the measurement has some immunity to the lift-off, but not perfect. The slope of LOC is still affected at some extent by the lift-off. Hence, a height tracking system was also proposed, which could stabilize the distance between the sensor and the target and significantly reduce the lift-off effect. The height tracking system contains a specially designed probe, which could vibrate rapidly to obtain a fast measurement speed, and its height can be adjusted up and down continuously to stabilize the lift-off. The sensorcoil in the thickness measurement system was also used as the height sensor in the height tracking system. Several experiments were conducted to test the system performances under static and dynamic conditions. This measurement system demonstrated significant advantages, such as simple and clear conversion between the slope of LOC and target thickness, high resolution and stability, and minimized effect of lift-off variation.