This paper presents the first cryogenic micromachined cooler that is suitable to cool from ambient temperature to 169 kelvin and below. The cooler operates with the vapor compression cycle. It consists of a silicon micromachined condenser, a flow restriction/evaporator and two miniature glass-tube counterflow heat exchangers, which are integrated with the silicon components using a novel gluing technique. The system was tested with ethylene gas from 20 to 1 bar, and produces a cooling power of 200 mW at 169 K with a mass flow of 0.5 mg/s
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机译:本文介绍了第一台适用于从环境温度冷却至169开尔文及以下的低温微机械冷却器。冷却器以蒸汽压缩循环运行。它由一个硅微机械冷凝器,一个限流/蒸发器和两个微型玻璃管逆流热交换器组成,它们使用新颖的胶合技术与硅组件集成在一起。该系统使用20至1 bar的乙烯气体进行了测试,在169 K时产生的冷却功率为200 mW,质量流量为0.5 mg / s
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