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Defect Cluster Analysis to Detect Equipment Specific Yield Loss Based on Yield-to-Area Calculations

机译：基于产量 - 面积计算的缺陷聚类分析检测设备特定产量损失

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作者
Christopher Hess; Larg H. Weiland;
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年度 1997
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2. Using an in-line defect-analysis tool to provide real-time root-cause knowledge of yield loss [J] . Stephanie Blanc-Coquand, Benoit Hinschberger, Eric Rouchouze, Micro . 2004,第5期

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4. Defect cluster analysis to detect equipment-specific yield loss based on yield-to-area calculations [C] . Christopher Hess, Univ. Karlsruhe, Karlsruhe, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III . 1997

机译：缺陷聚类分析，可根据产量对面积的计算来检测特定设备的产量损失
5. Estimating crop yields by integrating the FAO Crop Specific Water Balance model with real-time satellite data and ground-based ancillary data. [D] . Reynolds, Curt Andrew. 1998

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6. Relative Yield Loss Calculations in Wheat (Triticum durum Desf. cv. Camacho) due to Ozone Exposure [O] . Daniel de la Torre 2010

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7. Yield analysis of nano-crossbar arrays for uniform and clustered defect distributions [O] . Onur Tunali, Mustafa Altun 2017

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8. Fortran Programs for (P, gamma) Yield Calculations Based on Vavilov's Theory of Energy Loss Distributions [R] . Dunning, K. L. 1971

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Defect Cluster Analysis to Detect Equipment Specific Yield Loss Based on Yield-to-Area Calculations

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