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Fabrication of polarizer by metal evaporation of fused silica surface relief gratings

机译:通过金属蒸发熔融石英表面起伏光栅制备偏光片

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摘要

Our aim was to produce metal-wire grating polarizers by a simple two-step method. First, fused silica surface relief gratings were generated by two-beam interferometric laser-induced backside wet etching (TWIN-LIBWE) technique. The grating period was varied from 150 nm to 860 nm (p=150, 280, 460, 860 nm) by the changing of the incident angle of interfering beams. In the second step the gratings were selectively evaporated by thin silver (Ag) film using near grazing incidence (80°) ar-rangement to produce narrow metal wires. The thickness of metal film was 30±5 nm. The morphol-ogy of fabricated metal-wire structures were studied by scanning electron microscopy. The polariz-ers were tested in infrared wavelength range (λ=1532 nm). According to our measurements, the po-larisation contrast of 280 nm period structures was 1:10 for TE:TM transmitted modes. In this case the filling factor of metallic stripes are close to 0.7.
机译:我们的目标是通过简单的两步法生产金属线光栅偏振器。首先,通过两光束干涉激光诱导的背面湿蚀刻(TWIN-LIBWE)技术生成了熔融石英表面起伏光栅。通过改变干涉光束的入射角,将光栅周期从150nm改变为860nm(p = 150、280、460、860nm)。在第二步中,使用近掠入射(80°)排列的薄银(Ag)膜选择性地蒸发光栅,以产生窄金属线。金属膜的厚度为30±5nm。通过扫描电子显微镜研究了金属丝结构的形态学。在红外波长范围(λ= 1532 nm)中测试了偏振器。根据我们的测量,对于TE:TM传输模式,280 nm周期结构的极化对比为1:10。在这种情况下,金属条的填充系数接近0.7。

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