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>Handbook of microlitography, micromachining microfabrication, vol. 1: Microlitography Editor: P. Rai-Choudhury, IEE Materials Devices series 12, ISBN 0852969066, price: £85.00. Co-published by the IEE and SPIE
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Handbook of microlitography, micromachining microfabrication, vol. 1: Microlitography Editor: P. Rai-Choudhury, IEE Materials Devices series 12, ISBN 0852969066, price: £85.00. Co-published by the IEE and SPIE
