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RTCVD synthesis of carbon nanotubes and their wafer scale integration into FET and sensor processes

机译：碳纳米管的RTCVD合成及其晶圆级集成到FET和传感器工艺中

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Descripció del recurs: el 1 setembre 2011

机译：资源说明：2011年9月1日

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作者
Martín Fernández Iñigo;
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年度 2011
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正文语种 eng
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5. Electrical characterization and performance analysis of wafer scale lossy interconnection lines for wafer scale integration systems. [D] . Kim, Jaeseok. 1988

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6. Science and applications of wafer-scale crystalline carbon nanotube films prepared through controlled vacuum filtration [O] . Weilu Gao, Junichiro Kono 2019

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7. Wafer level approaches for the integration of carbon nanotubes in electronic and sensor applications [O] . Hermann Sascha, Fiedler Holge, Yu HB(于海波), 2012

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RTCVD synthesis of carbon nanotubes and their wafer scale integration into FET and sensor processes

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