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On the use of CrN/Cr and CrN interlayers in hot filament chemical vapour deposition (HF-CVD) of diamond films onto WC-Co substrates

机译:关于在金刚石薄膜到WC-Co基板上的热丝化学气相沉积(HF-CVD)中使用CrN / Cr和CrN中间层

摘要

CrN/Cr-based films were deposited using PVD-arc technique onto Co-cemented tungsten carbide (WC-Co) substrates and, then, seeded with diamond powder suspension or mechanically treated by Fluidized Bed Peening (FBP) of brittle diamond powders. Multilayered coatings were obtained from the superimposition of 4 mu m-thick diamond coatings, deposited on the PVD interlayer using hot filament chemical vapour deposition (HFCVD). The effectiveness of fluidized bed peened CrN/Cr interlayers on the adhesion enhancement of diamond on WC-Co substrates was studied and compared to diamond coated WC-Co substrates with unpeened CrN/Cr or CrN interlayers, or pre-treated with two-step chemical etching (Murakatni's reagent and Caro's acid, MC-treatment). In particular, growth, morphology, wear endurance and adhesion of the CVD deposited diamond films onto peened CrN/Cr interlayer were looked into. Diamond coatings on peened CrN/Cr interlayers exhibited a rougher surface morphology than as-prepared CrN/Cr films as a result of the surface roughening of the ductile Cr layer produced by the repeated impacts on it of the diamond powders during FBP. FBP was found to be a necessary step in improving the scarce adhesion of CVD diamond onto CrN/Cr-interlayer. However, the use of FB peened CrN/Cr interlayer did not represent the best way to pre-treat WC-Co substrates, as the unpeened single-layer CrN, or the use of MC pretreatment, was found to ensure better adhesion and wear endurance. (C) 2008 Published by Elsevier B.V.
机译:使用PVD电弧技术将CrN / Cr基薄膜沉积到共固结碳化钨(WC-Co)基底上,然后用金刚石粉悬浮液进行晶种或通过脆性金刚石粉的流化床喷丸处理(FBP)进行机械处理。通过使用热丝化学气相沉积(HFCVD)将4微米厚的金刚石涂层叠加在PVD中间层上,可以获得多层涂层。研究了流化床喷丸硬化的CrN / Cr中间层对WC-Co基底上金刚石附着力增强的有效性,并将其与具有未喷丸CrN / Cr或CrN中间层或经两步化学预处理的金刚石涂层WC-Co基底进行了比较蚀刻(Murakatni试剂和Caro酸,MC处理)。特别地,研究了在喷丸的CrN / Cr夹层上CVD沉积的金刚石膜的生长,形态,耐磨性和粘附性。硬化的CrN / Cr中间层上的金刚石涂层比制成的CrN / Cr膜具有更粗糙的表面形貌,这是由于在FBP期间金刚石粉末反复受到冲击而产生的韧性Cr层的表面变粗糙的结果。发现FBP是改善CVD金刚石在CrN / Cr中间层上稀缺附着力的必要步骤。但是,使用FB喷丸的CrN / Cr夹层并不是预处理WC-Co基材的最佳方法,因为发现未喷丸的单层CrN或使用MC预处理可确保更好的附着力和耐磨性。 (C)2008由Elsevier B.V.发布

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    Polini R; Barletta M;

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  • 年度 2008
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  • 正文语种 eng
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