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High-performance n-channel polycrystalline germanium thin-film transistors via continuous-wave laser crystallization and green nanosecond laser annealing for source and drain dopant activation

机译：高性能N沟道多晶锗薄膜晶体管通过连续波激光结晶和绿色纳秒激光退火源和排水掺杂剂活化

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Yi-Shao Li; Hao-Hsiang Liang; Chun-Yi Wu; Wen-Hsien Huang; Jun-Dao Luo; Kai-Chi Chuang; Wei-Shuo Li; Huang-Chung Cheng;
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1. High-performance n-channel polycrystalline germanium thin-film transistors via continuous-wave laser crystallization and green nanosecond laser annealing for source and drain dopant activation [J] . Li Yi-Shao, Liang Hao-Hsiang, Wu Chun-Yi, Japanese journal of applied physics . 2019,第SD期

机译：高性能n沟道多晶锗薄膜晶体管，通过连续波激光结晶和绿色纳秒激光退火来激活源极和漏极掺杂剂
2. High-performance n-channel polycrystalline germanium thin-film transistors via continuous-wave laser crystallization and green nanosecond laser annealing for source and drain dopant activation [J] . Li Yi-Shao, Liang Hao-Hsiang, Wu Chun-Yi, Japanese journal of applied physics . 2019,第SD期

机译：高性能N沟道多晶锗薄膜晶体管通过连续波激光结晶和绿色纳秒激光退火源和排水掺杂剂活化
3. Degradation Mechanism for Continuous-Wave Green Laser-Crystallized Polycrystalline Silicon n-Channel Thin-Film Transistors under Low Vertical-Field Hot-Carrier Stress with Different Laser Annealing Powers [J] . Mu-Chun Wang, Hsin-Chia Yang, Hong-Wen Hsu, Japanese journal of applied physics . 2011,第4ISSUE2期

机译：低垂直场热载流子下不同激光退火功率下连续波绿色激光晶体化多晶硅n沟道薄膜晶体管的衰减机理
4. Effects of germanium composition on performance of continuous-wave laser lateral crystallization n-channel polycrystalline silicon-germanium thin-film transistors on glass substrate [C] . Akito Hara, Kuninori Kitahara International Workshop on Active-Matrix Flatpanel Displays and Devices . 2021

机译：锗组成对玻璃基板上连续波激光横向结晶N沟道多晶硅锗薄膜晶体管的影响
5. Pulsed laser annealing of silicon structures for crystallization and dopant activation. [D] . Xu, Li. 2006

机译：硅结构的脉冲激光退火，用于结晶和掺杂剂激活。
6. Electrical and Structural Characteristics of Excimer Laser-Crystallized Polycrystalline Si1−xGex Thin-Film Transistors [O] . Kyungsoo Jang, Youngkuk Kim, Joonghyun Park, 2019

机译：准分子激光晶体化的Si1-xGex薄膜晶体管的电学和结构特性
7. High-Performance Short-Channel Double-Gate Low-Temperature Polysilicon Thin-Film Transistors Using Excimer Laser Crystallization [O] . Chun-Chien Tsai, Kai-Fang Wei, Yao-Jen Lee, 2007

机译：高性能短通道双栅极低温多晶硅薄膜晶体管使用准分子激光结晶

High-performance n-channel polycrystalline germanium thin-film transistors via continuous-wave laser crystallization and green nanosecond laser annealing for source and drain dopant activation

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