Flexible and transparent microcavity plasma devices: fabricated by polymer-based replica molding technique

摘要

The fabrication of flexible and transparent microplasma devices using plastic substrate has explored new avenues in plasma science and technology. A polymer-based replica molding process enables inexpensive and accurate production of microcavities of the devices. Best known as the sources of visible, ultraviolet (UV) and vacuum ultraviolet (VUV) radiation, microplasma devices fabricated by replica molding techniques also show potential applications as transparent and flexible displays, a radiation source for medical phototherapy, and photonic circuit light sources. In this thesis, the basic physics of plasma discharges is discussed and the performanceand fabrication of microplasma devices by a replica molding process is presented in detail.