Design of 'the Fancier', an Instrument for Fabrication and Analysis ofNanostructures Combining Ion and Electron Regulation (Ontwerp van 'the Fancier', een Instrument voor Fabrikage en Analyse van Nonostructuren door Gecombineerde Ionen en Elektronen Sturi

摘要

;Contents: Introduction to nanotechnology; The impact of charged particles onmatter; The applicability of charged particles for nanotechnology; Optical design of a combined ion and electron beam system for nanotechnology 'the Fancier'; Ion source and condenser system; The energy filtering system; The combined objective lens for ions and electrons; The secondary electron detector; Pattern generation facilities; Specimen stage; Mechanical and electronic design of the FANCIER; Summary and Samenvatting.