Simple, Detailed and Fast Firing Furnace Temperature Profiling for Improved Efficiency

摘要

A new temperature profiling method in a firing furnace is demonstrated. A data logger in a thermal barrier is connected to a thermocouple traveling through the furnace. The use of smaller and multiple thermocouples attached to a wafer enable more accurate profiling than the commonly used method. Possibilities for improving the firing furnace could be determined using the data logger and contact resistance scans made with the Corescan.