Radiolysis of Resist Polymers. 2. Poly(haloalkylmethacrylates) and Copolymers with Methylmethacrylate

摘要

Homopolymers of 2-fluoroethyl methacrylate (FEMA), 2-chloroethyl methacrylate (CEMA) 2-bromoethyl methacrylate (BEMA), 2,2,2-trichloroethyl methacrylate (TCEMA), 2,3-dibromopropyl methacrylate (DBPMA) and copolymers with MMA over a range of compositions have been synthesized. Gamma-radiolysis yields for scission (Gs), crosslinking (Gx) and radical formation (Gr) were determined. The volatile products were analyzed by GC-MS. Probable mechanisms of radiolysis of all polymers were proposed. (Author)