Simulation of mechanical deformation and tribology of nano-thin amorphous hydrogenated carbon (a:CH) films using molecular dynamics

摘要

Molecular dynamics computer simulations are used to study the effect of substrate temperature on microstructure of deposited amorphous hydrogenated carbon (a:CH) films. A transition from dense diamond- like films to porous graphite-like films is observed between substrate temperatures of 400 and 600 K for a deposition energy of 20 eV. The dense a:CH film grown at 300 K and 20 eV has a hardness ((similar to)50 GPa) about half that of a pure carbon (a:C) film grown under the same conditions.